【 中文摘要 】本发明公开了一种体声波谐振器及改进其聚能结构的方法，该体声波谐振器包括衬底、底电极层、压电层、顶电极层及聚能框架结构；所述聚能框架结构根据等效声阻抗要求可调，所述聚能框架结构根据等效阻抗要求调整时，包括：根据等效声阻抗要求选择聚能框架结构的材料；根据选定的材料调整聚能框架结构各部分的长度。本发明实现了聚能结构长度和材料的灵活选择，便于谐振器整体结构调整。同时可以在满足声阻抗失配的条件下，优选合适的框架结构，实现多种寄生模态声波的反射，达到提高谐振器品质因数的目的。

【 英文摘要 】The bulk acoustic wave resonator comprises a substrate, a bottom electrode layer, a piezoelectric layer, a top electrode layer and a energy gathering framework structure. The energy-gathering framework structure is adjustable according to an equivalent acoustic impedance requirement, and when the energy-gathering framework structure is adjusted according to an equivalent impedance requirement, materials of the energy-gathering framework structure are selected according to equivalent acoustic impedance requirements. The lengths of the portions of the energy-collecting frame structure are adjusted according to the selected material. To the invention, the length of the energy gathering structure and the material can be flexibly selected, and the overall structure of the resonator is convenient to adjust. , Under the condition that the acoustic impedance mismatch is met, a suitable frame structure is preferable, reflection of various parasitic mode sound waves is realized, and the purpose of improving the quality factor of the resonator is achieved.

【 技术功效 】