【 中文摘要 】本发明公开的一种基于TSV的嵌套磁芯电感器，包括硅衬底层，硅衬底层的上下表面各设置有一介质层，硅衬底层内设置有条状的磁芯，磁芯的外周沿其长度方向同心嵌套有两个螺旋电感器，两个螺旋电感器均由分别位于两个介质层内的金属互连线和上下穿过硅衬底层的硅通孔内的金属柱连接而成。本发明一种基于TSV的嵌套磁芯电感器，通过两个螺旋电感器的嵌套结构能够适应现有的集成电路工艺，实现了电感器占位面积的减半，电感器密度的倍增；此外，本发明还通过设置磁芯不仅有效的提高了单位面积的电感值，而且实现了电感值的可调，这使得电感器的利用率大大提高。

【 英文摘要 】The invention discloses a nested magnetic core inductor based on a TSV. Comprising a silicon substrate layer, The upper surface and the lower surface of the silicon substrate layer are respectively provided with a dielectric layer, A strip-shaped magnetic core is arranged in the silicon substrate layer, two spiral inductors are concentrically nested on the periphery of the magnetic core along the length direction of the magnetic core, and the two spiral inductors are formed by connecting metal interconnection lines respectively positioned in the two dielectric layers and metal columns vertically penetrating through silicon through holes of the silicon substrate layer. According to the nested magnetic core inductor based on the TSV, the nested structure of the two spiral inductors can adapt to the existing integrated circuit process, so that the occupied area of the inductor is halved, and the density of the inductor is multiplied; In addition, due to the arrangement of the magnetic core, not only is the inductance value of a unit area effectively improved, but also the inductance value can be adjusted, so that the utilization rate of the inductor is greatly improved.

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