【 中文摘要 】本发明公开了一种基于TSV垂直开关的可调磁芯TSV电感器，包括硅基板，所述硅基板的上表面设置有上二氧化硅基板，硅基板的下表面设置有下二氧化硅基板，所述上二氧化硅基板中嵌装有上回字形磁芯，下二氧化硅基板中嵌装有下回字形磁芯，所述上回字形磁芯和所述下回字形磁芯形成的四组对应侧边之间依次设置有控制电感Lctrl、电感L1、电感L2和电感L3，其中电感L1的输出端与电感L2的输入端连接，电感L2的输出端与电感L3的输入端连接；上回字形磁芯和下回字形磁芯中设置有TSV垂直开关，TSV垂直开关的源极与电感L1的输出端连接，TSV垂直开关的漏极与电感L3的输入端连接。

【 英文摘要 】The invention discloses an adjustable magnetic core TSV inductor based on a TSV vertical switch, which comprises a silicon substrate. An upper silicon dioxide substrate is arranged on the upper surface of the silicon substrate; a lower silicon dioxide substrate is arranged on the lower surface of the silicon substrate; an upper rectangular-ambulatory-plane magnetic core is embedded in the upper silicon dioxide substrate; a lower rectangular-ambulatory-plane magnetic core is embedded in the lower silicon dioxide substrate; a control inductor Lctrl, an inductor L1, an inductor L2 and an inductorL3 are sequentially arranged among four groups of corresponding side edges formed by the upper rectangular-ambulatory-plane magnetic core and the lower rectangular-ambulatory-plane magnetic core; theoutput end of the inductor L1 is connected with the input end of the inductor L2; the output end of the inductor L2 is connected with the input end of the inductor L3; and a TSV vertical switch is arranged in the upper rectangular-ambulatory-plane magnetic core and the lower rectangular-ambulatory-plane magnetic core, the source of the TSV vertical switch is connected with the output end of the inductor L1, and the drain of the TSV vertical switch is connected with the input end of the inductor L3.

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