【 中文摘要 】本发明公开了一种基于TSV垂直开关的惠斯通电桥可变电感器，包括顶部介质层a、中间硅衬底层和底部介质层b，硅衬底层中央设置有TSV垂直开关，TSV垂直开关具有漏极、栅极和源极，通过给栅极‑源极和漏极‑源极加不同的电压，可控制TSV垂直开关的通断，TSV垂直开关相对两侧的硅衬底层上分别设置有两排交错的硅通孔阵列，四排硅通孔通过金属线交替连接形成惠斯通电桥的四个桥臂，分别为电感L1、电感L2、电感L3和电感L4，电感L2和电感L3的一侧通过顶部金属线h相连通，电感L2和电感L3的另一侧通过顶部金属线i相连通，金属线h上引出有电感器输入端，金属线i上引出有电感器输出端。

【 英文摘要 】The invention discloses a wheatstone bridge variable inductor based on a TSV vertical switch. The wheatstone bridge variable inductor comprises a top dielectric layer a, a middle silicon substrate layer and a bottom dielectric layer b, wherein the TSV vertical switch is arranged in the center of the silicon substrate layer; the TSV vertical switch has a drain electrode, a grid electrode and a source electrode; by applying different voltages to the grid electrode-source electrode and the drain electrode-source electrode, the on-off of the TSV vertical switch can be controlled; two rows of staggered silicon through hole arrays are arranged on the silicon substrate layer on the two opposite sides of the TSV vertical switch respectively, the four rows of silicon through holes are alternately connected through metal wires to form four bridge arms of the wheatstone bridge, wherein the four bridge arms are an inductor L1, an inductor L2, an inductor L3 and an inductor L4 respectively; one side of the inductor L2 and one side of the inductor L3 are communicated through a top metal wire h, the other side of the inductor L2 and the other side of the inductor L3 are communicated through a topmetal wire I; an inductor input end is led out from the metal wire h, and an inductor output end is led out from the metal wire i.

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