【 中文摘要 】本发明公开了一种碳化硅环状电极PIN型核电池及其制作方法，主要解决现有技术中制作碳化硅PIN结核电池转化效率低的问题。本发明自上而下依次包括放射性同位素源层(1)、SiO2钝化层(3)、SiO2致密绝缘层(2)、p型欧姆接触电极(4)、掺杂浓度为1×1019～5×1019cm-3的p型SiC外延层(5)、掺杂浓度为1×1015～5×1015cm-3的n型SiC外延层(6)、掺杂浓度为1×1018～7×1018cm-3的n型SiC衬底(7)和n型欧姆接触电极(8)。该p型欧姆接触电极(4)采用中心为一个圆环，周围是以该中心为圆心的多个圆环结构，环间由多个矩形条相连，环的外围留有多个引脚，同位素源层(1)覆盖在p型欧姆接触电极(4)的表面。本发明具有能量转换效率高的优点，可作为MEMS片上电源、心脏起搏器电源和手机备用电源。

【 英文摘要 】The invention discloses a SiC ring electrode PIN-type nuclear battery and a manufacturing method thereof, which are mainly used for solving the problem that the conversion efficiency of the SiC PIN-junction battery in the prior art is lower. The SiC ring electrode PIN-type nuclear battery comprises a radioactive isotope source layer (1), a SiO2 passivation layer (3), a SiO2 compact insulation layer (2), a p-type ohmic contact electrode (4), a p-type SiC epitaxial layer (5) with the doping concentration of 1*1019-5*1019cm<-3>, an n-type SiC epitaxial layer (6) with the doping concentration of 1*1015-5*1015cm<-3>, an n-type SiC substrate (7) with the doping concentration of 1*1018-7*1018cm<-3> and an n-type ohmic contact electrode (8). A plurality of ring structures the centers of which arerings and the peripheries of which take the centers as circle centers are adopted in the p-type ohmic contact electrode, the rings are connected through a plurality of rectangular strips, a pluralityof pins are reserved on the peripheries of the rings, and the isotope source layer (1) covers the surface of the p-type ohmic contact electrode (4). The SiC ring electrode PIN-type nuclear battery has the advantage of high energy conversion efficiency and can be used as an MEMS (Micro-electromechanical System) on-chip power supply, a cardiac pacemaker power supply and a mobilephone standby power supply.

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